The present study aims to investigate the fundamental
electrical discharge machining (EDM) characteristics of silicon carbide (SiC)
single crystal material. The EDM machining performances of SiC are
experimentally studied and compared to that of steel. Die-sinking EDM of SiC by
utilizing copper foil electrodes was proposed and investigated. It was found
that EDM characteristics of SiC have a big difference from those of steel. The EDM
speed of SiC is higher and the tool wear ratio is lower compared to that of
steel material, although SiC has a higher thermal conductivity and melting
point. Thermal crack caused by the thermal shock of electrical discharges was
found as another main factor contributing to the removal of the material in EDM
of SiC material. Also it is concluded that the new foil EDM method for slicing
SiC ingot has potential for slicing SiC wafers in the future.
Source:Procedia
CIRP
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