Micro-electromechanical system (MEMS)
technologies were used to develop a thickness-mode piezoelectric micromachined
ultrasonic transducer (Tm-pMUT) annular array utilizing a lead magnesium
niobate–lead zirconate titanate (PMN–PZT) single crystal prepared by the
solid-state single-crystal-growth method. Dicing is a conventional processing
method for PMN–PZT single crystals, but MEMS technology can be adopted for the
development of Tm-pMUT annular arrays and has various advantages, including
fabrication reliability, repeatability, and a curved element shape. An
inductively coupled plasma–reactive ion etching process was used to etch a
brittle PMN–PZT single crystal selectively. Using this process, eight
ring-shaped elements were realized in an area of 1 × 1 cm2. The resonance
frequency and effective electromechanical coupling coefficient of the Tm-pMUT
annular array were 2.66 (±0.04) MHz, 3.18 (±0.03) MHz, and 30.05%,
respectively, in the air. The maximum positive acoustic pressure in water,
measured at a distance of 7.27 mm, was 40 kPa from the Tm-pMUT annular array
driven by a 10 Vpp sine wave at 2.66 MHz without beamforming. The proposed
Tm-pMUT annular array using a PMN–PZT single crystal has the potential for
various applications, such as a fingerprint sensor, and for ultrasonic cell
stimulation and low-intensity tissue stimulation.
Source:IOPscience
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